Quantitative infrared imaging of silicon-on-insulator microring resonators

There is considerable research activity in multiresonator optical circuits in silicon photonics, e.g., for higher-order filters, advanced modulation format coding/decoding, or coupled-resonator optical waveguide delay lines. In diagnostics of such structures, it is usually not possible to measure each individual microring resonator without adding separate input and output waveguides to each resonator. We demonstrate a non-invasive diagnostic method of quantitative IR imaging, applied here to a series cascade of rings. The IR images contain information on the otherwise inaccessible individual through ports and the resonators themselves, providing an efficient means to obtain coupling, loss, and intensity-enhancement parameters for the individual rings.