Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices

We present fabrication and characterization of tungsten (W) heaters for thermo-optic tuning on silicon-on-insulator (SOI).The waferscale fabrication of these thermal tuners was done using standard complementary metal-oxide-semiconductor (CMOS) back-end fabrication materials and processes.Static and transient characterizations of heaters are presented.