Thick films were prepared on glass substrates coated with indium tin oxide (ITO) via electrophoretic deposition using sols that contained phenylsilsesquioxane (PhSiO 3/2 ) particles derived from phenyltriethoxysilane. The transparency of the thick PhSiO 3/2 films was significantly improved via heat treatment at temperatures >200°C. Scanning electron microscopy observation showed that the thick films changed in morphology, from aggregates of particles with several open spaces among the particles to a monolith with no open spaces after the heat treatment. Transparent films ~3 µm thick were obtained when the films were heat‐treated at a temperature of 400°C for 2 h.
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Katagiri et al. (1998) studied this question.
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