A compact and transportable infrared multicomponent acquisition (IRMA) system based on infrared absorption spectroscopy has been developed for plasma diagnostics and control. The IRMA system contains four independent tunable diode lasers which can be temporally multiplexed and directed into plasma reactors or into a multipass cell for exhaust gas detection. Rapid scan software with real-time line shape analysis provides simultaneous measurements of the absolute concentrations of several molecular species.
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Röpcke et al. (2000) studied this question.
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