Comprehensive measurements in the vacuum uv range of 1200-3000 A of efficiency, polarization, and scattering of classically ruled and photoresist gratings are reported. The results show that the art of ruling gratings for vacuum uv use has reached a high level of sophistication and that careful analysis of grating properties can lead to useful improvement of the ruling art.
No takes yet. Share an insight, caveat, or question.
Mount et al. (1978) studied this question.
Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context: