A decade ago the fabrication and study of electron devices whose smallest features were just under 1 micron in size represented the forefront of the field. Today that forefront has moved down an order of magnitude to 100 nanometers, engendering new terminology based on the prefix nano, from the Greek word for dwarf: “nanoscale devices,” “nanolithography,” “nanofabrication.”
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Smith et al. (1990) studied this question.
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