Synergy Effect of Particle Radiation and Ultraviolet Radiation from Capacitively Coupled Radio Frequency Argon Plasmas on n-GaN Etching Damage, Kawakami, Retsuo, Inaoka, Takeshi, Tominaga, Kikuo, Kuwahara, Akinobu, Mukai, Takashi
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Kawakami et al. (2008) studied this question.
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