We report the first successful use of metalorganic chemical vapor deposition (MOCVD) in the fabrication of ferromagnetic oxide thin films. A substituted acetylacetonate barium complex has been used with ferrocene in a horizontal hot wall MOCVD system to deposit both polycrystalline and c-axis preferred films of BaFe12O19. These films were examined for crystallinity, morphology, composition, and magnetic properties. Their magnetic properties were found to be consistent with films prepared by other techniques.
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Donahue et al. (1992) studied this question.
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