Integration of a multimode interference coupler with a corrugated sidewall Bragg grating in planar polymer waveguides

We demonstrate the integration of a 3-dB multimode interference coupler with a corrugated sidewall Bragg grating in planar polymer waveguides by direct electron beam writing. Both transmission and reflection spectra of the Bragg grating are measured through this integrated device directly. We use the thermooptic effect to tune the integrated waveguide grating, achieving a tuning range of 6.2 nm and a bandwidth variation of 0.3 nm within a temperature change of 62/spl deg/C.