Radio-frequency hollow cathode etching reactor with multipolar confinement

A magnetically enhanced radio-frequency (13.56 MHz) triode plasma reactor with ‘‘multitubes hollow’’ cathode is characterized by measuring the self-bias potential Vdc and the saturation ion current density Js as a function of SF6 pressure and incident power. The cathode shape allows a decreasing of Vdc and an increasing of Js. For a power of 600 W and a pressure of 15 mTorr, Vdc does not exceed 200 V and Js is about 0.6 mA cm−2.