Adsorptive recovery of NF 3 and CF 4 using a scalable stacked coordination polymer

Q: What does this research mean for the field?

The flexible one-dimensional metal-organic framework Mn-dhbq enables highly efficient, scalable, and stable sieving separation of NF3 and CF4, achieving over 99.5% purity for both gases. Novelty: ClaimNovelty.NOVEL_FINDING. Consensus alignment: ConsensusAlignment.NEUTRAL.

Yan‐Long Zhao; Jiamei Yu; Lu Liu; Xin Zhang; Heng‐Yu Ruan; Xuefeng Bai; Xiang‐Yu Li; Jian‐Rong Li

doi:10.1002/aic.70623

August 25, 2026AIChE Journal

Adsorptive recovery of NF 3 and CF 4 using a scalable stacked coordination polymer

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Key Points

To develop a scalable and energy-efficient adsorbent for separating nitrogen trifluoride (NF3) and carbon tetrafluoride (CF4) from semiconductor waste streams.
Synthesized a flexible one-dimensional coordination polymer, Mn-dhbq, at hundred-gram scale in room-temperature water and shaped it into pellets using hydroxyethyl cellulose.
Measured single-component gas adsorption isotherms at 298 K and 1 bar, calculated IAST selectivity, and conducted cyclic dynamic breakthrough experiments.
Mn-dhbq adsorbed 1.24 mmol·g⁻¹ of NF3 compared to 0.14 mmol·g⁻¹ of CF4 at 298 K and 1 bar, achieving an IAST selectivity of 10.6 for an equimolar mixture.
Dynamic breakthrough tests demonstrated high-purity recovery (≥ 99.5%) for both CF4 and NF3 during adsorption and desorption phases, respectively, maintaining stable performance across 5 cycles.

Implication

Experimental study demonstrates selective adsorption of nitrogen trifluoride over carbon tetrafluoride using Mn-dhbq, highlighting a scalable pathway for greenhouse gas mitigation.

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Cite This Study

Zhao et al. (2026) studied this question.

synapsesocial.com/papers/6a8fe9ad10c91c1e926216b4 https://doi.org/10.1002/aic.70623

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Adsorptive recovery of NF 3 and CF 4 using a scalable stacked coordination polymer

Key Points

Implication

Abstract

Discussion

Cite This Study

Adsorptive recovery of NF 3 and CF 4 using a scalable stacked coordination polymer

Key Points

Implication

Abstract

Discussion

Cite This Study

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