Crystallographic Effects on Energy Dissipation in High- Q Silicon Bulk-Mode Resonators

This letter reports measured results of quality factor (Q) for single-crystal silicon square-plate resonators in relation to their crystal orientation within the (100) plane. Results from both the Lamé and extensional modes oriented in the 〈110〉 and 〈100〉 axes are presented.Qappears to be dependent on orientation for the Lamé mode. In the extensional mode, there is no significant difference inQbetween the two axes due to the dominance of anchor loss. These trends agree well with the brief theoretical analysis that we have described here to provide a quantitative basis for interpreting the trends betweenQand orientation observed in our measurements.