Soft x-ray scanning microtomography with submicrometer resolution

Scanning soft x-ray microtomography was used to obtain high-resolution three-dimensional images of a microfabricated test object. Using a special rotation stage mounted on the scanning transmission x-ray microscope at the X1A beamline at the National Synchrotron Light Source, we recorded nine two-dimensional projections of the 3D test object over an angular range of −50° to +55°. The x-ray wavelength was 3.6 nm and the radiation dose to the object per projection was approximately 2×106 Gy. The object consisted of two gold patterns supported on transparent silicon nitride membranes, separated by 4.75 μm, with 100- to 300-nm-wide and 65-nm-thick features. We reconstructed a volumetric data set of the test object from the two-dimensional projections using an algebraic reconstruction technique algorithm. Features of the test object were resolved to ∼100 nm in transverse and longitudinal extent with low artifact in three-dimensional images rendered from the volumetric set.