Laser Synthesis of Si/C/N Powders from 1,1,1,3,3,3‐Hexamethyldisilazane

Laser‐driven pyrolysis of the organosilicon compound 1,1,1,3,3,3‐hexamethyldisilazane ((Me 3 Si) 2 NH) yields amorphous fine powders (0.1 μm) containing Si, C, and N. Reactant Si and N retentions are 100% and 90%, respectively. The C content of the powder can be varied by changing the pyrolysis temperature, and the N content can be varied by adding NH 3 to the reactant gas. Upon firing, SiC is produced, with unusually facile loss of nitrogen from the powder.