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Accelerator-based nuclear techniques were used to study the ageing of as-prepared and aluminium-capped porous silicon samples with a porosity of 55% and with two different morphologies (microporous and mesoporous). Aluminium surface capping layers with thicknesses in the range 0.1-0.5 m were applied by rf sputtering. The uncapped microporous samples aged more rapidly in air than did mesoporous samples. The sputtered capping layers were found to be effective for stabilizing porous silicon against atmospheric oxidation, irrespective of the thickness of the capping layer.
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Giaddui et al. (1998) studied this question.
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