Algorithms to Deconvolve Stylus Geometry From Surface Profile Measurements

Stylus methods for measuring surface topography impose certain limits on resolving the true profile of a surface. These limits are primarily due to the finite geometric size of the stylus. In this paper, kinematic and geometric algorithms are developed to compensate for stylus geometry so as to present a better picture of the true surface profile. To demonstrate their effectiveness, these algorithms are applied to simulated deterministic and stochastic profile measurements.