Three‐element in‐phase coherently coupled arrays of vertical cavity surface‐emitting lasers (VCSELs) were fabricated using proton implantation. The arrays show excellent beam quality with a far‐field divergence of 4°, while maintaining a stable in‐phase mode until a maximum output power of 4 mW under continuous‐wave condition. The process for the arrays is simple and the cost is low.
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Xun et al. (2014) studied this question.
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