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December 1, 1981IEEE Electron Device Letters

MOSFET's in electron-beam recrystallized PolySilicon

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Authors

TKT. I. KaminsStanford UniversityBHBrian P Von HerzenCalifornia Institute of Technology

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Kamins et al. (1981) studied this question.

synapsesocial.com/papers/6a90dbbd51c11e6b603604e1https://doi.org/10.1109/edl.1981.25447
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  1. 1Thin film MOSFET’s fabricated in laser-annealed polycrystalline silicon1979 · 117 citations
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  5. 5Surface Stabilization of Polycrystalline‐Silicon Films during Laser Recrystallization1981 · 26 citations