Chemical composition effects upon polymer electron energy absorption and radiation chemistry have been identified to develop resist design criteria. By use of Bethe's theory for electron scattering in solids, chemical incorporation of higher atomic‐numbered substituents is predicted to decrease energy absorption and increase scattering. Incorporation of chlorine or fluorine into vinyl polymers at the possible substituent sites is empirically found to have a large effect upon radiation G (scission) and G (crosslink) values. G (scission) values determined for several copolymers over a large range of compositions are found to vary linearly with composition. In contrast, G (crosslink) values are found to be generally less than those predicted from a linear extrapolation between the homopolymer values. Electron beam resist behavior is found to correlate well with the Gs/Gx ratio.
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Helbert et al. (1980) studied this question.
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