Morphology and Growth Process of Carbon Films Prepared by Microwave / Radio Frequency Plasma Assisted CVD

In this work the carbon coatings created by microwave/radio frequency plasma assisted chemical vapour deposition method were investigated. The deposition parameters were optimized in order to obtain homogeneous carbon coatings on such different substrates as AISI 316L steel and silicon. The MW/RF PACVD technique is promising for many different types of applications.