Scanning spectrometer/monochromator for a wavelength range of 50 – 330 Å

Abstract A flat-field scanning spectrometer/monochromator of the Hettrick – Underwood type is implemented for a wavelength range λ ≈ 50 – 330 Å. The optical arrangement of the spectrograph comprises a focusing spherical (R = 6000 mm) mirror, mounted at a grazing angle of 8.34 °, and a grazing-incidence plane varied line-space (VLS) grating operating for a constant deflection angle of 16.68 °. The entrance and output slits of the instrument are immobile, and the focal distance varies only slightly over its operating spectral range. The short-wavelength boundary of the operating range is determined by the spectral source brightness and the reflection coefficients of the grating and the mirror rather than by defocusing. Laser-produced plasma spectra excited by a focused laser beam (0.5 J, 8 ns, 1.06 μm) are recorded. A spectral resolving power λ/δλ = 1300 is demonstrated at a wavelength of 182 Å. The configuration of the instrument of this type is suited to soft X-ray reflectometry and metrology with the use of laser-plasma and synchrotron radiation sources, and is perfectly compatible with modern CCD detectors.