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December 1, 1974Journal of Applied Physics

Time evolution of developed contours in poly-(methyl methacrylate) electron resist

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JGJames S. GreeneichASM International

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James S. Greeneich (1974) studied this question.

synapsesocial.com/papers/6a910f3f504d7cdc493e899c https://doi.org/10.1063/1.1663227

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