Electric fatigue properties of sol–gel-derived Pb(Zr, Ti)O3/PbZrO3 multilayered thin films

The effect of various stacking sequences of sol–gel-prepared Pb(Zr, Ti)O3/PbZrO3 (PZT/PZ) multilayered thin films on the electric fatigue properties was investigated. The antiferroelectric layer between the Pt electrode and the ferroelectric layers acted as a barrier to fatigue. The initial P*r-P∧r (about 5 μC/cm2) of the PZ(1 layer)/PZT(5 layers)/PZ(1 layer) film remained nearly unchanged after 109 cycles of a ±10 V square-wave pulse. The leakage current of the multilayered films did not show any change during 109 cycles.