RF‐MEMS filters will replace conventional filters in mobile communication as they offer better performance at lower cost. Requirements and key performance parameters for filters in next‐generation mobile applications are reviewed in detail. The fundamentals of RF‐MEMS filters — and in particular thin‐film bulk acoustic wave (BAW) filters — are summarized in a comprehensive form. The state‐of‐the‐art in BAW filters and future trends are presented. Supplementary information covers manufacturing and commercialization issues.
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Robert Aigner (2003) studied this question.
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