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The bonded species in hydrogenated fluorinated amorphous silicon (a-Si:H:F) have been identified in the infrared spectra as SiH₂ (2100, 890, and 630 cm^-1), SiH (2000 and 630 cm^-1), SiF₄ (1015 cm^-1), SiF₂ (930 cm^-1), and SiF (830 cm^-1), or alternatively as SiH (2000 and 630 cm^-1), SiF₄ (1015 cm^-1), SiF₂ (930 cm^-1), and SiHF (2100, 890, 830, and 630 cm^-1). To distinguish between these configurations, we have deposited deuterated fluorinated amorphous silicon (a-Si:D:F) by dc glow discharge and measured the infrared spectrum. Based on the isotopic shifts of the vibrational modes, we conclude that SiHF is not present, and thus support the former assignments.
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Langford et al. (1990) studied this question.
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