Simple method for measuring the porosity, thickness and refractive index of porous silicon, based on the Fabry-Pérot interference spectrum

This article presents a technique to estimate, nondestructively, the thickness, porosity and refractive index of porous silicon samples.The technique is based on the Fabry-Pérot interference spectrum analyzed by the Reflectometric Interference Fourier Transform Spectroscopy (RIFTS).The technique, also known as SLIM -Spectroscopic Liquid Infiltration Method takes into account the infiltration of a liquid with known refractive index inside the pores of the samples.