The effects of substrate and bias on CoNiCr/Cr thin films

The magnetic properties and microstructural characteristics of CoNiCr/Cr films with thin Cr underlayers prepared on both single-crystal Si and glass substrates are discussed. It is found that [200] crystallographic texture is easily obtained for Cr films prepared on Si at room temperature. Substrate bias during the Cr deposition, however, changes the Cr [200] texture to [110]. Substrate bias during the CoNiCr deposition degrades the texture of the Cr underlayer.>