An accurate correction technique for on-wafer small-signal lightwave measurements of photodetectors is presented. This technique is an improvement of the conventional calibration methods for on-wafer lightwave measurements. Mathematical expressions for the dominant error sources that exist in the measurement system are derived. Experimental results for an InGaAs-InP pin photodiode show a smoother modulation response characteristic when the presented technique is used.>
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Debie et al. (1995) studied this question.