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July 15, 1993Journal of Applied Physics

Stress, strain, and microstructure in thin tungsten films deposited by dc magnetron sputtering

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TVT.J. VinkPhilips (Netherlands)WWW. WalravePhilips (Netherlands)JDJ. DaamsMaterial (Belgium)

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Vink et al. (1993) studied this question.

synapsesocial.com/papers/6a913eefce47fdb2afb39560https://doi.org/10.1063/1.354842
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