Integrated Radiation Detectors with a-Si Photodiodes on Ceramic Scintillators

Solid-state monolithic-type X-ray detectors were fabricated by preparing amorphous silicon photodiodes monolithically on a Gd2O2S ceramic scintillator. The X-ray detection sensitivity of the solid-state detectors was comparable to that of a xenon ionization detector. It could be improved by optimizing the amorphous silicon photodiode and the intermediate materials between the photodiodes and the scintillator. The performance of the X-ray detector did not deteriorate even after 500,000-roentgen irradiation.