Crystallized Ta2O5 thin films have been deposited on fused quartz substrates by reactive dc diode sputtering. Crystalline structures and piezoelectric properties of the films were investigated. The electromechanical coupling coefficient K2 of the surface acoustic waves was 0.5% for hk=1.0. This value is comparable to that for ZnO thin films.
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Nakagawa et al. (1985) studied this question.
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