Chemical State Analysis by X-Ray Fluorescence Using Absorption Edges Shifts

Recently synchrotron radiation (SR) sources have been extensively used for the study of materials science. The high intensity of tunable monochromatic X-rays from SR facilitates many types of spectroscopic/ diffraction studies which have otherwise not been possible. Regarding the X-ray fluorescence technique, significant improvement of the minimum detection limit has been performed and has enabled trace element analysis in the order of tens of ppb or 10-12 g.3-8 SR microanalyzers and near surface analysis using grazing incidence geometry are also attractive applications of synchrotron X-ray fluorescence technique. From a point of materials characterization, chemical state analysis is not less important than ordinary element analysis.