We have deposited nano-crystalline diamond films in a routine hot filament chemical vapor deposition system, using CH 4 /H 2 gas mixture. We used various measurements such as field emission scanning electron microscopy, micro-Raman spectroscopy, x-ray photoelectron spectroscopy, and transmission electron microscopy for characterization. The result show that the films consist of a crystalline diamond phase with small grain sizes ranging from 20 to 100 nm.
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Zhang et al. (2000) studied this question.
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