Silicon Nitride Film Deposition by Photochemical Vapor Deposition Using an Argon Excimer Lamp, Maezono, Yoshinari, Toshikawa, Kiyohiko, Kurosawa, Kou, Amari, Kouichi, Ishimura, Sou, Katto, Masahito, Yokotani, Atsushi
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Maezono et al. (2007) studied this question.
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