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Fabrication of Silicon-on-Nothing Structure by Substrate Engineering Using the Empty-Space-in-Silicon Formation Technique, Sato, Tsutomu, Mizushima, Ichiro, Taniguchi, Shuichi, Takenaka, Keiichi, Shimonishi, Satoshi, Hayashi, Hisataka, Hatano, Masayuki, Sugihara, Kazuyoshi, Tsunashima, Yoshitaka
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Sato et al. (2004) studied this question.
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