Study on corrosion of porous silicon in KOH and NaOH solution

The corrosion of porous silicon in KOH and NaOH aqueous solution with or without organic solvents was studied by weight loss measurements. The results show that the corrosion rate goes up with increasing temperature and concentration of alkali solution. In the 1·0M NaOH aqueous solution, the corrosion rate can be improved with the additives of ethanol or methanol, and reduced by the additives of acetonitrile, isopropanol or N,N-dimethylformamide. The activation parameters of Ea, A, ΔHa and ΔSa of porous silicon corrosion in KOH and NaOH aqueous solution with or without ethanol were calculated and discussed.