Growth of epitaxial strontium barium niobate thin films by solid source metal-organic chemical vapor deposition

Strontium barium niobate (SrxBa1−xNb2O6) thin films have been epitaxially grown on (0 0 1)MgO, (1 1 0)MgO and (0 0 1)Sr0.75Ba0.25Nb2O6 substrates by solid source metal-organic chemical vapor deposition. Films became amorphous when the substrate temperature was below 535°C. The crystallinity of the film improved approximately with decreasing growth rate. Film compositions could be controlled by varying source compositions. Single crystalline films were deposited on (0 0 1)Sr0.75Ba0.25Nb2O6 single crystal substrates while films grown on (0 0 1)MgO and (1 1 0)MgO substrates revealed four in-plane orientations. Waveguiding behavior was demonstrated for both TE and TM modes with the films grown on (0 0 1)MgO substrates. The measured refractive indices were in agreement with those of bulk crystal.