A Monte Carlo simulation of primary and secondary electron trajectories in a specimen

A new Monte Carlo calculation model is presented to simulate not only the primary electron behavior but also the secondary electron cascade in a specimen bombarded with an electron beam. Electrons having energy greater than 0.1 keV are treated as ‘‘fast electrons’’ and the previous single scattering Monte Carlo model is adopted. Electrons having energy smaller than 0.1 keV are treated as ‘‘slow electrons’’ and the electron cascade Monte Carlo model is used. The calculated results for the energy distribution of secondary electrons, and primary electron energy dependence of the total secondary yield and the backscattering yield are in good agreement with experimental results.