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The voltage-displacement-characteristics of tube-shaped piezoscanners were determined and used for the calibration of the scanning range of a scanning probe microscope (SXM). Inside a scanning electron microscope the displacements were measured as a function of the voltage and analysed by an imaging system. The detection of non-linearities as well as the investigation of the dynamic properties are possible. The method may be useful for various applications, e.g., all SXM instrumentation as well as micropositioning devices.
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Müller et al. (1995) studied this question.
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