Submicron GaAs microwave FET's with low parasitic gate and source resistances

The substantial reduction in gate metallization resistance and improvement in performance of submicron-gate GaAs FET's has been achieved by employing a mushroom profile defined by electron-beam exposure. Using MBE growth of buffer, channel, and n+ contact layers, minimum noise figures of 1.0-1.1 dB have been demonstrated at 8 GHz, with associated gains of 13-14 dB.