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Standard X‐ray photoelectron spectroscopy (XPS) analysis is thought of by many as a non‐destructive form of analysis; however, both the interaction of the X‐ray photons and the subsequent electron cascade can cause significant changes to the analysed area. This XPS Insights paper gives a brief overview to this phenomenon, supported by specific examples and experimental advice to assess and minimise damage during analysis.
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David Morgan (2023) studied this question.
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