In this paper, we investigate the influence of different N2/O2ambient compositions during POCl3diffusion on the emitter quality, characterized by secondary ion mass spectrometer and electrochemical capacitance-voltage measurements (J0E) and internal quantum efficiency. It is presented that O2concentration during the drive-in step strongly impacts both emitter electrical properties and cell performances, supported by the loss breakdown analysis. This process can be easily adapted to the industry, improving the emitter quality for screen-printed solar cells.
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Li et al. (2016) studied this question.
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