Role of Surface Chemistry in Semiconductor Thin Film Processing

ADVERTISEMENT RETURN TO ISSUEPREVArticleNEXTRole of Surface Chemistry in Semiconductor Thin Film ProcessingJ. G. Ekerdt, Y.-M. Sun, A. Szabo, G. J. Szulczewski, and J. M. WhiteView Author Information Departments of Chemical Engineering and of Chemistry and Biochemistry, Center for Materials Chemistry, and Center for Synthesis, Growth, and Analysis of Electronic Materials, University of Texas at Austin, Austin, Texas 78712 Cite this: Chem. Rev. 1996, 96, 4, 1499–1518Publication Date (Web):June 20, 1996Publication History Received11 September 1995Revised9 April 1996Published online20 June 1996Published inissue 1 January 1996https://pubs.acs.org/doi/10.1021/cr950236zhttps://doi.org/10.1021/cr950236zresearch-articleACS PublicationsCopyright © 1996 American Chemical SocietyRequest reuse permissionsArticle Views1315Altmetric-Citations60LEARN ABOUT THESE METRICSArticle Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstract