Synthesis and properties of epitaxial thin films of c-axis oriented metastable four-layered hexagonal BaRuO3

We have grown epitaxial thin films of c-axis oriented metastable four-layered hexagonal BaRuO3 on a (111) SrTiO3 substrate by 90° off-axis sputtering techniques. X-ray diffraction and transmission electron microscopy reveal that the films are single domains of c-axis four-layered hexagonal structures with an in-plane epitaxial arrangement of BaRuO3 [21̄1̄0]∥SrTiO3[110]. Surfaces with smooth terraces having a step height of a half unit cell (∼4.7 Å) have been observed by scanning tunneling microscopy. The in-plane electrical resistivity of the films is metallic, with a room temperature value of 810 μΩ cm and slightly curved temperature dependence. Their magnetic susceptibility is Pauli paramagnetic. The metastable layered metallic oxide can be used for understanding new solid-state phenomena and device applications.