The flux and temperature dependence of titanium silicide islands formed by reactive deposition near 500^∘C indicate a critical nucleus containing 2 Ti atoms and a single activation energy of Ed+1/2E₂0ex0ex=0ex0ex1.4±0.2eV, where Ed and E₂ are the surface diffusion and cluster binding energies, respectively. These values are not consistent with STM observations of Ti dimer-vacancy hopping at lower temperatures and show that silicide island nucleation involves a different, highly mobile Ti species.
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McDaniels et al. (2001) studied this question.
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