Initial results on laser-induced chemical vapor deposition using the visible radiation of an Ar+ laser are presented. Due to the smaller wavelength of Ar+ laser radiation in comparison to the infrared radiation of a CO2 laser used in earlier experiments, much finer patterns could be produced. The influence of laser irradiance on the deposition rate and widths of patterns was investigated.
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Leyendecker et al. (1981) studied this question.
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