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AC-thin film ZnS:Mn electroluminescent devices are fabricated by the Metal Organic Chemical Vapor Deposition, using dimetylzinc and H2S as source materials. The crystal structure of the MOCVD-prepared ZnS film on glass is (111)-oriented cubic polycrystalline. The electroluminescent center Mn is added into MOCVD-prepared ZnS film through thermal diffusion. The brightness and efficiency of the MOCVD-prepared EL devices are higher than those of the EB-evaporation prepared EL devices having the same structure. The MOCVD-prepared EL devices exhibit few dark spots, and therefore exhibit high stable operation and high breakdown voltage.
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Hirabayashi et al. (1985) studied this question.
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