Material degradation through corrosion is a major threat to any process industry. The losses due to corrosion can be either direct or indirect. Combating this problem by engineering the surfaces is the economically viable solution. Chemical Vapor Deposition is the modem technology whereby the condensation of the solid material takes place from the vapor phase at a higher temperature. CVD finds extensive applications in optical, ceramic, electronic and allied industries. The possibility of controlling the deposition composition, microstructure, and making tailor-made coatings for specific applications has made CVD more user-friendly. This review briefly reviews the thermodynamics, kinetics, design and technological aspects of Chemical Vapor Deposition, and also summarizes its potential use for surface engineering for corrosion and wear protection.
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Sathiyanarayanan et al. (2005) studied this question.
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