Evaluation of Interfacial Nitrogen Concentration of RTP Oxynitrides by Reoxidation, Okada, Yoshio, Tobin, Philip J., Lakhotia, Vikas, Ajuria, Sergio A., Hegde, Rama I., Liao, Jimmy C., Rushbrook, Peter P., Arias, Louie J.
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Okada et al. (1993) studied this question.