December 19, 2003Journal of The Electrochemical Society

Photo-Induced Atomic Layer Deposition of Tantalum Oxide Thin Films from Ta(OC[sub 2]H[sub 5])[sub 5] and O[sub 2]

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Abstract

Photo-Induced Atomic Layer Deposition of Tantalum Oxide Thin Films from Ta ( OC 2 H 5 ) 5 and O 2 , Lee, Young-Hoon, Kwak, Jae-Chan, Gang, Bong-Suck, Kim, Hie-Chul, Choi, Byung-Ho, Jeong, Bong-Kyo, Park, Sung-Ho, Lee, Kyuoung-Ho

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Lee et al. (2003) studied this question.

synapsesocial.com/papers/6a933201a39474a2bd78d6ac https://doi.org/10.1149/1.1629096

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Photo-Induced Atomic Layer Deposition of Tantalum Oxide Thin Films from Ta(OC[sub 2]H[sub 5])[sub 5] and O[sub 2]

Abstract

Discussion

Cite This Study

Photo-Induced Atomic Layer Deposition of Tantalum Oxide Thin Films from Ta(OC[sub 2]H[sub 5])[sub 5] and O[sub 2]

Abstract

Discussion

Cite This Study

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